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About vacuum pumps?
About vacuum pumps?
Mechanical vacuum pump normally used for pumping in low vacuum or pump level as before the high vacuum system.
Generally based on whether the use of lubricating oil to be divided into dry and oil-sealed pumps, dry vacuum pumps are generally used in the semiconductor industry requires high cleanliness or need to extract the toxic gases and gases generated by the chemical reaction particles, oil-sealed pumps shall use grease to lubricate the exhaust heat and seal, so the issue of oil and gas pollution.
The vacuum pump oil must meet the low vapor pressure, high molecular weight, viscosity, excellent resistance to emulsification and stability.
Match of vacuum pumps and vacuum systems need to take into account the applicable pressure range of the pump, pumping compression than the ultimate pressure, pumping speed, and its related accessories.
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